The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 1995
Filed:
Jul. 22, 1994
Masami Yoneda, Omiya, JP;
Toshikazu Akaogi, Omiya, JP;
Fuji Photo Optical Co., Ltd., Omiya, JP;
Abstract
An alignment verification system for adjusting the posture of a test piece on a support table into alignment with a reference plate on an interferometer containing a light source to irradiate the test piece and reference plate, the verification system including: a bi-axial adjustment means for tilting the support table in the directions of perpendicularly intersecting X- and Y-axis; spot image forming means arranged to converge light reflections from a master surface of the reference plate and an inspecting surface of the test piece into spot images of a predetermined diameter at a predetermined spot image-forming plane; a line sensor located at the spot image-forming plane across the spot image of the reference plate and having a linear light receiving face switchable through 90.degree. between an X-axis position and a Y-axis position corresponding to the directions of the X- and Y-axes of the bi-axial adjustment means, for detecting the spot image of the test piece in relation with tilting adjustments of the support table by the bi-axial adjustment mechanism in each of the X- and Y-axis positions; and a sensor drive mechanism adapted to switch the light receiving face of the line sensor from the X-axis position to the Y-axis position or vice versa upon detecting the spot image of the test piece in one of the X- and Y-axis positions.