The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 1995
Filed:
May. 03, 1994
Isamu Kaminaga, Itami, JP;
Shuuichi Matsue, Itami, JP;
Takahiko Arakawa, Itami, JP;
Shuuichi Katoh, Itami, JP;
Masahiro Ueda, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
There is disclosed a semiconductor integrated circuit device including an element-to-element line (10A) of a quadrangular (rectangular) configuration in cross section having horizontal upper and lower surfaces, with its lower surface corners on the side of a semiconductor substrate (1) chamfered on the slant. This increases the horizontal distance between adjacent lines and decreases the height of the line, permitting the adjacent line-to-line parasitic capacitance to be lower than that of the prior art line of a quadrangular configuration in cross section under the same height and line-to-line horizontal distance conditions. The line-to-substrate parasitic capacitance is also permitted to be lower for similar reasons. The semiconductor integrated circuit device is thus provided in which the parasitic capacitances generated by forming lines are minimized.