The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 1995
Filed:
Mar. 30, 1994
Koji Nomura, Osaka, JP;
Tutomu Nakanishi, Osaka, JP;
Tokumi Kotani, Osaka, JP;
Keizaburo Kuramasu, Tsuzuki, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A pyroelectric infrared radiation detector for detecting the intensity of infrared radiation with a pyroelectric element. The pyroelectric infrared radiation detector comprises a substrate made of a single crystal material and an infrared radiation detecting structure which comprises a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation. The substrate has a recess provided in the upper surface thereof where the infrared radiation detecting structure is seated. A method of producing the pyroelectric infrared radiation detector comprises a first step of forming a first electrode on one surface of a substrate, a second step of forming a pyroelectric thin film on the first electrode, a third step of forming a second electrode on the pyroelectric thin film, a fourth step of providing etching apertures in the first electrode which is open to the substrate, and a fifth step of providing by wet etching process a recess(es) in the surface of the substrate where the first electrode is seated.