The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 1995
Filed:
Dec. 14, 1993
Applicant:
Inventors:
Dureseti Chidambarrao, Derby, CT (US);
Louis L Hsu, Fishkill, NY (US);
J Daniel Mis, Poughkeepsie, NY (US);
James P Peng, Poughkeepsie, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 68 ; 437 62 ;
Abstract
In an isolation trench in a silicon-on-insulator wafer, the sidewalls of the trench curve outwardly at the bottom of the trench where the top silicon layer meets the underlying oxide insulating layer. This sidewall geometry eliminates the sharp corner at the bottom of the trench. Preferably, the top edge of the trench wall is also curved.