The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 1995
Filed:
Jul. 11, 1994
John T Davies, El Sobrante, CA (US);
Stephen J Egbert, Palo Alto, CA (US);
John R Wagar, Bethel Island, CA (US);
GaSonics, Inc., San Jose, CA (US);
Abstract
Apparatus and method for generating steam free of silica-containing droplets. The apparatus makes use of the fractional distillation properties of water/quartz mixtures. At the moderately high pressures and corresponding boiling temperatures which are used in the apparatus, the steam generated from water containing quartz is considerably purer than the water from which it originated. The apparatus includes a boiler supplied with de-ionized water. The boiler has a steam generating chamber and level indicators to provide sensing of overfill and underfill levels, respectively. Steam passes out of the boiler chamber into and through a large number of small vent holes into another chamber containing quartz pieces. Droplets collect on these quartz pieces and either evaporate or gravitate and return to the boiler chamber. All parts of the apparatus of the apparatus are made of quartz except the dump valve body which is constructed from plastic material. A microprocessor-based controller provides the proper sequence of water filling, boiling, automatic level control, heat power level and emptying the water at the end. This is triggered by the controller as appropriate and returns normal and emergency conditions to the main controller. It also provides for the use of safety interlocks.