The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 1995
Filed:
Nov. 17, 1993
Yoshiaki Kohama, Kawasaki, JP;
Kaoru Ohmori, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A charged particle electron microscope comprises: a sample chamber to which a gas used for gas amplification is supplied; a charged particle irradiation means for irradiating a sample set in the sample chamber with a charged particle beam; at least one first electrode member provided inside the sample chamber to which a first voltage is applied; at least one second electrode member provided inside the sample chamber to which a second voltage different from the first voltage is applied; a high voltage power source control means for controlling the first and the second voltages; and a synthesizer for synthesizing a current signal obtained from the first electrode member and a current signal obtained from the second electrode member, wherein the sample is observed by using a synthetic signal output from the synthesizer as a picture signal.