The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 1995

Filed:

Apr. 20, 1994
Applicant:
Inventors:

Joseph M Ilardi, Sparta, NJ (US);

George Schwartzkopf, Franklin Township, NJ (US);

Gary G Dailey, Easton, PA (US);

Assignee:

J. T. Baker Inc., Phillipsburg, NJ (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C11D / ; C11D / ; C11D / ; C23G / ;
U.S. Cl.
CPC ...
252156 ; 252102 ; 252173 ; 25217421 ; 134-2 ; 134 42 ;
Abstract

Aqueous alkaline cleaning solutions for cleaning microelectronic substrates and maintaining substrate surface smoothness comprise a metal ion free base, a nonionic surfactant and a component to reduce or control the pH of the cleaning solution to a pH within the range of from about pH 8 to about pH 10.


Find Patent Forward Citations

Ilardi, Joseph. (1995). Ph adjusted nonionic surfactant-containing alkaline cleaner composition (U.S. Patent No. 5466389). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5466389

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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