The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 1995
Filed:
Apr. 04, 1994
Clem H Brown, Scottsdale, AZ (US);
David L Vowles, Phoenix, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
An electronic pressure sensor (10) is enhanced by attaching a sensor die (18) to a stress isolation platform (12) using an adhesive (42) having a similar thermal coefficient of expansion. The adhesive provides a hermetic seal between the stress isolation platform and the pressure sensor die. A via (20) in the stress isolation platform provides an opening for pressure to be applied to the sensor die. The stress isolation platform is attached to a plastic package body (16) via a semi-rigid adhesive (40) for providing stress isolation and a hermetic seal between the package body and the stress isolation platform. Any hostile chemical entering the via contacts an exposed diaphragm (50) of the sensor die to assert pressure against its piezoelectric network (52) to generate the electrical signals representative of the applied pressure but are kept away from the sensitive interconnects by the hermetic seals.