The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 1995
Filed:
Jan. 17, 1995
Applicant:
Inventor:
Hanno Melzner, Feldkirchen Westerham, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C03C / ;
U.S. Cl.
CPC ...
1566441 ;
Abstract
A self-aligned through hole (5), particularly a bit line through hole to a source/drain region (2) that is self-aligned relative to the word line, is produced in neighboring word lines (3a) having a greater spacing from one another in the proximity of the source/drain region than at other locations. Narrow spacings are completely filled by surface-wide deposition of an insulating intermediate layer and subsequent, anisotropic etching, whereas insulating spacers (4') are formed in enlarged interspaces at side walls of the encapsulated word lines (3) and thereby form a self-aligned through hole.