The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 1995
Filed:
Dec. 22, 1993
Masahiro Yamamoto, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
In a semiconductor acceleration detecting apparatus, an amplification circuit is provided on a movable portion of an acceleration detecting beam, not on a fixed portion thereof, and the size of the fixed portion and the circuit area thereon are thus reduced. A damage detecting circuit is mounted on the fixed portion to detect breakage of the acceleration detecting beam and damage to various circuits, and a damage detecting interconnection is disposed along a peripheral edge of the movable portion, across a diaphragm and across an outer peripheral edge of the movable portion. Consequently, the size of the acceleration detecting beam can be reduced without changing the size of the movable portion i.e., without changing the characteristics of the apparatus, thus reducing the entire size of the semiconductor acceleration detecting apparatus.