The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 1995
Filed:
Oct. 02, 1992
Hirofumi Tanaka, Amagasaki, JP;
Tetsuya Nakanishi, Amagasaki, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A beam position monitor capable of detecting the exact position of a beam of charged particles even if the beam has a large cross sectional area with its beam center being deviated from the center of the monitor. A plurality of electrodes 4A through 4D are disposed in a vacuum chamber 3 for inducing voltages when a beam passes through the vacuum chamber. A first voltage ratio is determined based on the voltages at the respective electrodes induced by the beam to thereby detect the beam position. An antenna 10 is disposed in the vacuum chamber 3 at a beam path for inducing voltages at the respective electrodes. A second voltage ratio is determined based on the voltages at the respective electrodes induced by the antenna whereby the first voltage ratio is corrected by using the thus determined second voltage ratio. The antenna has a cross sectional area equal to or less than that of the beam.