The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 1995
Filed:
Jun. 02, 1993
Applicant:
Inventors:
Seiichi Kiyama, Takatsuki, JP;
Hitoshi Hirano, Nishinomiya, JP;
Yoichi Domoto, Higashiosaka, JP;
Keiichi Kuramoto, Hirakata, JP;
Assignee:
Sanyo Electric Co., Ltd., Osaka, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05A / ; C23C / ;
U.S. Cl.
CPC ...
427530 ; 427531 ; 427566 ; 4272481 ; 4272553 ; 427294 ; 20419216 ;
Abstract
The disclosed method of forming a high-function material film such as a ZrN thin film on a substrate in a vacuum chamber allows the color tone and uniformity of the film to be controlled. Gaseous nitrogen and gaseous oxygen, or nitrogen ions and oxygen ions, are supplied to the substrate while hard material atoms such as Zr atoms are emitted from an evaporation source toward the substrate. A supply partial pressure of the gaseous oxygen is set at a value within a range from about 10.sup.-5 Torr to about 10.sup.-4 Torr.