The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 1995
Filed:
Jan. 24, 1995
James W Loomis, St. Helena, CA (US);
Other;
Abstract
A method for applying a controlled, adjustable strain and strain rate by use of a break wheel to break a frangible semiconductor wafer around previously placed scribe lines formed along a surface of the wafer. Several embodiments of a break wheel are disclosed. One embodiment uses a pair of spaced profiles engageable on opposite sides of a scribe line on the wafer. Another embodiment uses three laterally spaced contact profiles, the center profile having a smaller radius than that of the two flanking contact profiles. Another embodiment uses a complaint break wheel for applying a resilient breaking force to the wafer in a region straddling the scribe line. All embodiments are used with a tilted surface having a break edge with which the scribe line is aligned prior to the application of the breaking force. The tilted surface is adjustable to provide a variable maximum strain limit.