The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1995
Filed:
Jul. 27, 1993
Applicant:
Inventors:
Carl W Nelson, Hayward, CA (US);
Richard D Weir, Agoura Hills, CA (US);
Assignee:
Tulip Memory Systems, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ; H01L / ;
U.S. Cl.
CPC ...
21912152 ; 21912143 ; 2191214 ; 156345 ; 20429837 ;
Abstract
A hollow-cathode plasma device includes a hollow chamber composed of an electrically conductive material with a gas inlet at one end and a plasma outlet at an opposite end, a multipolar magnet array surrounding a portion of the chamber for isolating the plasma from the walls of the chamber, and a radiofrequency power source connected to the chamber.