The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1995
Filed:
Dec. 12, 1994
Tukasa Koumura, Toyota, JP;
Kiyoshi Saeki, Okazaki, JP;
Nippondenso Co., Ltd., Kariya, JP;
Abstract
In order to perform micromachining of a precision smooth curved surface on a workpiece, light emitted from a mercury lamp is transmitted through a photomask, Fourier transform lens, aperture material, and inverse Fourier transform lens, after which it is beamed upon the workpiece material to be surface-machined and a positive photoresist layer which is formed on the surface of the workpiece material. By means of the foregoing structure, the high-frequency optical components which are included in the light emitted from the mercury lamp and which may cause roughening of curved-surface machining are made to converge at a location away from the optical axis and are removed by means of an aperture provided thereupon, with the only the residual low-frequency optical components being transmitted through the aperture, and so the intensity profile of the light which is beamed upon the positive photoresist layer is smoothed and a smooth-surface curved surface is transcribed to the positive photoresist layer.