The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1995
Filed:
May. 06, 1994
Kabushiki Kaisha Kobe Seiko Sho, Kobe, JP;
Abstract
A process for surface treatment which comprises mechanically polishing the surface of a stainless steel component with abrasive grains having particle diameters of 1-10 .mu.m to such an extent that the surface has a work-strained layer formed therein which is characterized by that X-ray diffraction by the (111) plane of austenitic iron gives the diffraction beams whose half-value width (2.theta.) is greater than 0.5 degree, and subsequently performing heat treatment in an atmosphere in which the partial pressure of oxygen is low, thereby forming an oxide film composed mainly of chromium oxide which has a thickness greater than 200 .ANG. and a surface roughness R.sub.max smaller than 1 .mu.m. The surface-treated stainless steel exhibits outstanding corrosion resistance to halogen gases such as Cl.sub.2, HCl, and F.sub.2. It has such a smooth surface that it hardly adsorbs moisture vapor and gases. Therefore, it is suitable for use as components of semiconductor manufacturing apparatus.