The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 1995
Filed:
Nov. 10, 1993
Takayuki Yagi, Yokohama, JP;
Hiroshi Takagi, Yokohama, JP;
Masahiro Fushimi, Zama, JP;
Tomoko Murakami, Yamato, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A microactuator having a piezoelectric material and a drive electrode formed adjacent to the piezoelectric material is manufactured by forming an electroplating electrode on a substrate and providing a photosensitive material layer on the substrate on which the electroplating electrode is formed. The photosensitive material layer is exposed in a desired pattern. The exposed photosensitive material layer is developed to partially remove the exposed photosensitive material layer. A metal with electroplating is filled in a substrate portion from which the photosensitive material layer is removed, so that a drive electrode is formed. A remaining photosensitive material layer is removed. Finally, a piezoelectric material is selectively filled in a substrate portion adjacent to the drive electrode.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile