The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 1995
Filed:
Mar. 05, 1992
Applicant:
Inventors:
John C Fan, Chestnut Hill, MA (US);
Paul M Zavracky, Norwood, MA (US);
Jagdish Narayan, Raleigh, NC (US);
Lisa P Allen, Norton, MA (US);
Duy-Phach Vu, Taunton, MA (US);
Ngwe K Cheong, Boston, MA (US);
Assignee:
Kopin Corporation, Taunton, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117-2 ; 117-3 ;
Abstract
An improved method of zone-melting recrystallizing of a silicon film on an insulator in which the film is implanted and annealed to achieve a reduction of the density of defects within the film.