The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 1995

Filed:

Mar. 18, 1994
Applicant:
Inventor:

Chiayu Ai, Tucson, AZ (US);

Assignee:

Wyko Corporation, Tucson, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356359 ;
Abstract

Fizeau interferometer that utilizes a multimode laser as a light source for testing transparent thin-plate samples. As a result of multimode linear laser operation, interference fringes are obtained only when the optical path difference between the reference surface and test surface is equal to twice a multiple of the laser's effective cavity length. By judicially selecting the multimode spectrum of operation and the effective cavity length of the laser, the interferometer may be calibrated to produce interference fringes at a workable separation between the reference and test surfaces without ghost interference fringes from the far surface of the thin-plate sample. Another embodiment of the invention alternatively utilizes two linear lasers with different effective cavity lengths to eliminate ghost interference fringes when the optical thickness of the thin-plate is equal to a multiple of one laser's effective cavity length.


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