The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 1995
Filed:
Jul. 22, 1993
Applicant:
Inventors:
Masamichi Fujihira, Yokohama-shi, Kanagawa, JP;
Tatsuaki Ataka, Tokyo, JP;
Hiroshi Muramatsu, Tokyo, JP;
Assignees:
Seiko Instruments Inc., , JP;
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250234 ; 250306 ; 25022726 ; 25022711 ;
Abstract
An optical scan type tunnel microscope based on a new principle, having higher resolution, is provided. The apparatus of the invention is comprised of at least an optical fiber 3 whose head portion is covered by an energy acceptor 6, a prism on which a sample which contains an energy donator 7 or is covered by the energy donator 7 is placed, a XY-axis transfer mechanism 9, XY-axis control mechanism 10, Z-axis transfer mechanism 11, Z-axis control mechanism 12, light source 13, optical system 14, and an optical detecting system 15.