The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 1995
Filed:
May. 07, 1993
Applicant:
Inventor:
Shigeru Kasai, Yamanashi, JP;
Assignee:
Tel-Varian Limited, Nirasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B / ;
U.S. Cl.
CPC ...
31856817 ; 31856822 ; 318590 ;
Abstract
A control system includes a first estimation section for estimating a first state variable of a plant object such as a semiconductor wafer temperature control arrangement on the basis of a control input supplied to the plant object and an output from the plant object, a second estimation section for estimating a second state variable of the plant object on the basis of the control input alone, a switching section for selecting one of the first and second estimation sections, and a servo section for adjusting the control input by feeding back the state variable from the first or second estimation section to an input section of the plant object.