The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 1995
Filed:
May. 23, 1994
Applicant:
Inventor:
Hideo Matsuyama, Saitama, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 2503 / ; 250397 ;
Abstract
A device for reducing the magnetic field, leaked from an electromagnetic lens, in the sample position of a scanning electron microscope, a sample is mounted on a sample cassette which is made of a material having high magnetic permeability, and a head portion of an electron optical system which is made of a material having high magnetic permeability is arranged on the sample side. A window for passing a probe beam therethrough is provided in a wall surface of the electron optical system. Both the sample cassette and the electron optical system head portion surround the sample to constitute a magnetic shield.