Method and apparatus for sterilization of and treatment with ozonized

Abstract

Disclosed are a method for treatment with ozonized water which comprises feeding primary pure water to an ultrapure-water producing device containing at least a polisher to convert the primary pure water to ultrapure water, injecting an ozone-containing gas into the ultrapure water to produce ozonized water, sending the ozonized water to a point of use, using the ozonized water for treatment, and circulating the resulting spent ozonized water to the ultrapure-water producing device for reuse or discharging the spent water, wherein the method further comprises supplying a hydrogen-containing gas to the spent ozonized water at a point downstream from the use point to remove residual ozone from the ozonized water, a method for the ozone sterilization of ultrapure water which comprises feeding primary pure water from a primary-pure-water tank to an ultrapure-water producing device containing at least a polisher to convert the primary pure water to ultrapure water, sending the ultrapure water to a use point through a feed line, treating an object with the ultrapure water at the use point, and circulating the resulting spent pure water to the primary-pure-water tank through a return line, which method includes injecting ozone into the spent pure water between the use point and the primary-pure-water tank and supplying a hydrogen-containing gas to the primary pure water between the primary-pure-water tank and the ultrapure-water producing device to conduct residual-ozone removal and oxygen elimination, and apparatuses for use in practicing these methods.