The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 1995
Filed:
Mar. 21, 1994
Applicant:
Inventor:
Douglas A Webb, Allen, TX (US);
Assignee:
Texas Instruments, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; B29C / ; C23F / ;
U.S. Cl.
CPC ...
216-2 ; 216 49 ; 216 58 ; 216 83 ; 73488 ; 359295 ; 437228 ; 437927 ;
Abstract
A method for reducing sticking between contacting elements in a micromechanical device is disclosed. In addition, a micromechanical device is disclosed wherein the elements of the device are less likely to stick. The method for reducing sticking in a micromechanical device (10) comprises forming a protective layer (26) on a first contact element (14) to reduce the likelihood of a first contacting element (14) sticking to another contacting element (20). The protective layer (26) may be formed of a fluoro-polymer such as Teflon-AF.