The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 1995
Filed:
Aug. 25, 1994
Applicant:
Inventor:
John H Bower, Livermore, CA (US);
Assignee:
The BOC Group, Inc., New Providence, NJ (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20429821 ; 20429822 ; 20429823 ;
Abstract
An improved rotatable magnetron enabling efficient removal and replacement of a target structure, having axially movable structures including at least one spindle, which may be extended to engage or retracted to disengage the target structure, and means for extending into a magnet structure within the target structure to selectively fix a rotational position of the magnet structure, and preferably having water and vacuum seals integrated into cartridges which are disposed between spindles and seal housings of the improved rotatable magnetron.