The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 1995

Filed:

Oct. 20, 1993
Applicant:
Inventors:

Kazunari Yoshimura, Kadoma, JP;

Kuninori Nakamura, Kadoma, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356376 ; 25055922 ;
Abstract

A shape detecting arrangement allows a shape of an object to be very precisely detected at a high resolution, by projecting a plurality of light beams in mutually different ways onto an identical spot of the object substantially in an identical direction, forming on a position detector images of beams of the projected beams reflected back from the object, obtaining a ratio of intensity of the reflected beams by virtue of outputs from the position detector, obtaining positions of the respective reflected beams by virtue of variation component of the ratio of intensity with respect to a reference plane for detecting the position of the object, and finally obtaining height displacement of the respective positions obtained with respect to the reference plane on the basis of the positions and angles of incidence of the reflected beams into the position detector.


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