X-ray source with improved beam steering

Abstract

This invention is directed to an x-ray source comprising a housing, an elongated tubular probe, a target assembly, and a beam steering assembly. The housing encloses an electron beam source, and has elements for generating an electron beam along a beam path. The elongated tubular probe extends along a central axis from the housing about the beam path. The target assembly extends along the central axis and is adapted for coupling to the end of the probe distal form the housing. The target assembly includes a target element positioned along the beam path, wherein the target element is adapted to emit x-rays in a predetermined spectral range in response to incident electrons. The beam steering assembly includes a deflection element, a feedback network, and a deflection controller. The deflection element deflects the beam from a nominal axis to a selected surface region on the target element in response to a deflection control signal. The feedback network includes deflection sensing elements for sensing the deflection of the beam and elements for generating a feedback signal representative thereof. The deflection controller couples to the deflection element and to the feedback network and includes elements for generating a deflection control signal in response to the feedback signal.