The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 1995
Filed:
Apr. 29, 1994
John A Nees, Ann Arbor, MI (US);
Shin-ichi Wakana, Sagamihara, JP;
Regents of the University of Michigan, Ann Arbor, MI (US);
Fujitsu Limited, Kanagawa, JP;
Abstract
An ultrafast scanning probe with 2.5-picosecond response time and 10-nanometer spatial resolution. In one embodiment, a single probe tip is formed on an input electrode layer which is at least partially formed on a cantilever portion of the probe. The cantilever portion is formed by at least one layer including a film of AlGaAs which has a reflective top surface to reflect a laser beam therefrom. A photoresponsive planar switch is formed by a portion of the input electrode layer, a semiconductor portion of the at least one layer and a portion of an output electrode layer. In another embodiment, the switch is a non-planar photoresponsive switch. The single probe tip of the probe is utilized to both acquire an image of an electronic device and measure electrical signals of the device. An optical fiber may be used for support and to supply a pulsed switching beam to the photoresponsive switch.