The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 1995
Filed:
May. 02, 1994
Applicant:
Inventors:
Robert C Taft, Austin, TX (US);
Craig D Gunderson, Austin, TX (US);
Arkalgud R Sitaram, Austin, TX (US);
Assignee:
Motorola Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437189 ; 437193 ; 437200 ; 437228 ; 437229 ; 437241 ; 148D / ; 148D / ;
Abstract
In one embodiment, delamination of a patterned silicon nitride anti-reflective layer (26) from an underlying patterned tungsten silicide layer (32), is prevented by forming a thin silicon layer (30) between the patterned tungsten silicide layer (32) and the overlying patterned silicon nitride anti-reflective layer (26).
Quick Actions:
Taft, Robert. (1995). Method of forming conductive interconnect structure (U.S. Patent No. 5441914). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5441914
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile