The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 15, 1995

Filed:

Apr. 04, 1994
Applicant:
Inventor:

Vida I Burger, Phoenix, AZ (US);

Assignee:

Motorola, Inc., Schaumburg, IL (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 41 ; 437 44 ; 437 45 ; 437 57 ;
Abstract

A complementary insulated gate field effect transistor (10) having a partial channel. A gate electrode structure (29, 31) is formed on a dopant well (13, 14). An implant block mask (33, 38) is formed on a portion of the gate structure. An impurity material is implanted into the dopant well to form a dopant region (34, 39) having a first portion (36, 42) and a second portion (37, 41). The implant is of sufficient energy that a portion of the impurity material penetrates a portion gate electrode structure (29, 31) to form the second portion (37, 41) which serves as the partial channel. The partial channel provides the complementary insulated gate field effect transistor (10) with a low subthreshold swing, and improved saturation current and source/drain parasitic capacitance.


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