The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 1995
Filed:
Nov. 30, 1994
Dennis L Krause, Atkinson, NH (US);
David C Wojewoda, Londonderry, NH (US);
AT&T Corp., Murray Hill, NJ (US);
Abstract
A magnetron sputtering apparatus is disclosed having a cooling block including an inner conduit. A target is provided having first and second grooves in a first surface thereof. At least a portion of the first surface of the target is in contact with a first surface of the cooling block. A first pole piece is positioned within the first groove, and a second pole piece is positioned within the second groove. A first magnet is provided having a first polarity in contact with the first pole piece. A second magnet is provided having the opposite polarity of the first magnet in contact with the second pole piece. A plate is provided in contact with a second surface of the cooling block and the first and second magnets. Means are provided for supplying a coolant to the inner conduit of the cooling block and for applying a voltage to the cooling block. The first and second pole pieces conduct a magnetic flux produced by the first and second magnets towards an opposite second surface of the target.