The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 1995
Filed:
Jan. 10, 1994
Applicant:
Inventor:
Yukio Ogura, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; B23K / ; G03B / ;
U.S. Cl.
CPC ...
359365 ; 359853 ; 359858 ; 359861 ; 355 53 ; 355 67 ; 362298 ; 21912174 ;
Abstract
In an optical illumination instrument for use in photolithographic process of manufacturing semiconductor devices, a reflection type homogenizer is composed of an array of paraboloid mirrors of a same size arranged on a same plane.