The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 1995
Filed:
Jun. 02, 1993
Applicant:
Inventors:
Kazuo Yokoyama, Hirakata, JP;
Motoshi Shibata, Hirakata, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
25042411 ; 250306 ; 73105 ;
Abstract
Three point contact legs are provided on the bottom of a housing of a probe head for sliding on a surface of a sample to be observed or on a sliding surface provided in the vicinity of the sample. The housing is held by a thin plate spring which is provided in a manner to be parallel with the surface of the sample. The sample or probe head is driven by an X-Y drive unit for positioning the relative position of the probe to the sample.