The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 1995
Filed:
Jan. 06, 1993
Sumio Hosaka, Tokyo, JP;
Atsushi Kikugawa, Kokubunji, JP;
Yukio Honda, Fuchu, JP;
Hajime Koyanagi, Koshigaya, JP;
Shigeyuki Hosoki, Hachioji, JP;
Tsuyoshi Hasegawa, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A surface observing apparatus for obtaining information of a specimen comprises a probe disposed in the close vicinity of the specimen, a deformable cantilever for holding the probe, a scanning mechanism for scanning a surface of the specimen with the probe and a detector for detecting displacements of the cantilever to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever. The apparatus further comprises a first detector for detecting a force acting on the probe from the displacement of the cantilever, and a second detector for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.