The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 1995
Filed:
Feb. 03, 1993
Applicant:
Inventors:
Masaru Itoo, Mitsukaido, JP;
Masumi Fujita, Toride, JP;
Assignees:
Hitachi, Ltd., Tokyo, JP;
Hitachi Maxell, Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430311 ; 2504921 ; 355 53 ; 355 71 ;
Abstract
It is possible to improve the resolution of a formed pattern by utilizing anti-dissolution surface treatment of a photoresist layer and super resolution of an optical system, thereby to print a finer pattern having a narrower width than that of the resolving power determined by the wavelength of light used and the numerical aperture of a projection optical system, and patterning in the order of submicron is made possible easily when applied to a printing technique in a manufacturing process of semiconductor integrated circuits.