The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1995
Filed:
Jun. 11, 1993
Toshiro Ishiyama, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An optical position detecting apparatus detects a position level and inclination of a surface of an object to be detected without the need to increase the working distance of an objective optical system. The apparatus includes an objective optical system having a lens arranged to face the surface, an illuminating optical system for supplying a position detecting light beam from the periphery of the objective optical system, a photodetector for generating an electric output corresponding to a light beam received, a condenser optical system for converging a reflected light beam from the surface illumunated with the incident light beam from the illuminating optical system onto a photosensing surface of the photodetector, and a beam directing optical element for directing at least one of the incident light beam and the reflected light beam into an optical path passing through the lens.