The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1995
Filed:
Mar. 04, 1994
Hiroshi Iwamoto, Ibaraki, JP;
Hiroshi Hirose, Katsuta, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Disclosed is a sample position controller in a focused ion beam system in which a reference unit quantity on a surface of a sample having a structure in which a pattern is repeated at regular intervals is calculated on the basis of the quantity of movement of the sample to which a focused ion beam is radiated and a cyclic detection signal outputted from a charged particle detector with the sample movement as changing correspondingly to the change of the arrangement structure of the surface of the sample, so that the sample position is set on the basis of the reference unit quantity while controlling the moving operation of a sample moving mechanism by using the reference point set on the sample and the reference unit quantity calculated.