The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1995
Filed:
Dec. 27, 1993
Applicant:
Inventors:
Herng-Der Chiou, Tempe, AZ (US);
Raul P Torres, Austin, TX (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
437 10 ; 437225 ; 437247 ; 118715 ; 118725 ; 29 2501 ; 219390 ;
Abstract
A solid metal-gettering material is used between walls of a double-walled processing chamber, such as a furnace tube and an RTP chamber. The solid metal-gettering material getters metal before the metal reaches the substrate within the processing zone of a the processing chamber. Polysilicon pellets and silicon carbide pellets are examples of types of solid metal-getting materials, although other materials may be used. A purge gas may be flow within the gap or the gap may be evacuated while the pellets lie within the gap. Limitations on shapes and sizes of the pellets and purge gas flow rate are determined by the size of the gap.