The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 1995
Filed:
Jun. 17, 1994
Gerald W Barnett, Austin, TX (US);
Advanced Micro Devices Inc., Sunnyvale, CA (US);
Abstract
A barcode processing system for a semiconductor wafer, comprising a workstation controller, a bar code reader attached to the workstation controller for reading a bar code assigned to the wafer, a tool assigned to the workstation controller for processing the wafer, and a host computer assigned to the tool and the workstation controller for determining the appropriate process to be performed on the wafer. The bar code read by the bar code reader is sent to the workstation controller, and the workstation controller requests processing information from the host computer, wherein that request includes information obtained from the bar code read by the bar code reader and sent to the workstation controller. The host computer determines an appropriate process step, or recipe, to be applied to the wafer based upon the information received from the processing information request from the workstation controller, and sends this information to the workstation controller. The workstation controller determines an appropriate process associated with this process step. Once the workstation controller has the appropriate process to be applied to the wafer, the workstation controller determines if that process can be performed by the tool associated with the workstation controller. If the process can be performed by the tool, the recipe is sent to the tool so that the tool has the information it needs to process the wafer.