The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 1995
Filed:
Feb. 22, 1993
Applicant:
Inventor:
Marc A Taubenblatt, Pleasantville, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G02B / ; G06F / ;
U.S. Cl.
CPC ...
356364 ; 356237 ; 356401 ; 2502062 ; 2502061 ;
Abstract
A method and apparatus for inspecting a repeating pattern on an object using an optical inspection system to detect variations in the pattern. The object is illuminated with substantially monochromatic light. A diffracted beam is formed. The diffracted beam has a plurality of polarization components. At least one of the polarization components of the diffracted beam is blocked. Variations in the pattern are detected as light intensity variations in the polarization components that are not blocked.