The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 1995

Filed:

May. 10, 1993
Applicant:
Inventors:

Keiji Takata, Tokorozawa, JP;

Hiromichi Shimizu, Hoya, JP;

Shigeyuki Hosoki, Hachioji, JP;

Sumio Hosaka, Tokyo, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
73618 ; 73634 ; 73643 ; 250307 ; 2504 / ;
Abstract

A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample, a strain wave detecting device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.


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