Facility and gas management system

Abstract

An interactive computer controlled management system for real-time data gathering and analysis of process information relating to a plurality of data sources in a facility and for controlling process functions of the data sources. In a preferred embodiment, the data sources include gas cabinet panels and related process equipment typically found in a wafer fab facility. The system operates in a distributed processor environment and includes a host processor having graphic, control and user interfaces and a multi-ported processor networked to the host processor. The multi-ported process includes protocol sensitive hardware interfaces for communication with the programmable logic controllers of each particular data source. The multi-ported processor also includes software means for emulating a common protocol such that each gas cabinet or other connected device appears to the host processor as an address location in a memory of the multi-ported processor. The address locations are sequentially polled by the host for updated status, alarm and set point information which is displayable at the host terminal. The functions of the management system are divided into three primary information management and monitoring areas including alarm management, map functions and administrative functions. The alarm management functions permit acknowledgement of alarms and retrieval of updated alarm information. The map functions provide specific information about gas cabinets and other components within the facility. The administrative functions control basic system operation such as access, report generation and shut down procedures.