The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 1995
Filed:
Sep. 09, 1994
Kanetake Takasaki, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A method of producing a compound semiconductor crystal-on-substrate structure includes forming a first compound semiconductor crystal layer made of a group III-V compound semiconductor on a Si substrate, forming a stacked structure by forming an amorphous compound semiconductor layer made of the group III-V compound semiconductor on the first compound semiconductor crystal layer, subjecting the stacked structure to a thermal process, removing at least the amorphous compound semiconductor layer from the stacked structure that is subjected to the thermal process, and forming a second compound semiconductor crystal layer made of the group III-V compound semiconductor, to thereby form the compound semiconductor crystal-on-substrate structure.