The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 1995

Filed:

Jan. 06, 1994
Applicant:
Inventors:

Harry Dietrich, Kirchardt, DE;

Andreas Gruhle, Heilbronn, DE;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 31 ; 437131 ; 437110 ; 437126 ; 437200 ;
Abstract

Manufacture of a semiconductor array of integrated silicon-germanium heterobipolar transistors having a silicon collector layer, a silicon-germanium base layer, a silicon emitter layer and a silicon emitter contact layer includes depositing in a single uninterrupted process and simultaneously doping the collector layer, the base layer, the emitter layer and the emitter contact layer. A base connection region is formed at the side of the base layer such that the intersection surfaces of the base/emitter/PN boundary layer and of the base/collector PN boundary layer with the surface of the semiconductor array are outside the silicon-germanium base layer. A silicon dioxide layer is formed by thermal oxidation over the entire exposed surface of the semiconductor array.


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