The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 1995
Filed:
Oct. 20, 1993
Applicant:
Inventor:
Akio Mishima, Kanagawa, JP;
Assignee:
Sony Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24C / ;
U.S. Cl.
CPC ...
451 36 ; 451 37 ; 451 38 ; 451 75 ; 451102 ;
Abstract
In a powder beam etching method, a nozzle for injecting fine particles and a work are moved relative to each other in two perpendicular directions, viz., a scanning direction and a feed pitch direction during each scanning motion. During each return scanning motion the path followed is arranged to fall in between the path of the preceding forward motion.