The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 1995
Filed:
Jun. 18, 1993
Junji Manaka, Omorinishi, JP;
Ricoh Seiki Company, Ltd., Tokyo, JP;
Abstract
A flow sensor for sensing heat conduction with a high-speed response, and manufactured by applying IC micro-machining technology to have a reduced clearance between the heating portion and the sensing portion. The flow sensor has a substrate having a through hole or a cavity formed therein, whereon a heating portion and a sensing portion are formed each in the form of a layer bridged over the through hole or the cavity and supported at both ends or at one end. The heating portion and the sensing portion are laminated in two or three or more layers spaced from each other and arranged along the flow of gas to be measured. Each inner layer space is fine and accurate by precisely forming a very thin film that is removable.