The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 1995
Filed:
May. 25, 1993
Heinrich Fischer, Furstentum, LI;
Balzers Aktiengesellschaft, Furstentum, LI;
Abstract
A method for a reactive surface treatment of a workpiece, according to which a treatment gas is let out of at least one infeed opening into a treatment chamber and is drawn off said treatment chamber through at least one draw off opening, which openings are arranged adjacent of each other over and across the area to the surface to be treated and feature axes of the openings which extend at least approximately perpendicularly to the surface to be treated. The treatment chamber further includes a support for positioning of the workpiece in such a manner that at least one infeed opening which is connected to a gas delivery device for a treatment gas and at least one draw off opening which is connected to a gas draw off device are located opposite the surface of the positioned workpiece.