The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1995
Filed:
Feb. 19, 1993
Applicant:
Inventors:
Assignee:
Sextant Avionique, Meudon la Foret Cedex, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G / ;
U.S. Cl.
CPC ...
3612834 ; 29 2541 ;
Abstract
A capacitive micro-sensor includes a sandwich of at least two silicon plates. A peripheral stripe of each side of one plate is assembled to a corresponding stripe of the opposing surface of an adjacent plate through an insulating layer. The lateral sides of the sandwich are provided with notches partially penetrating in each of the insulating layers, and are thicker than the thickness of the insulating layers.