The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1995
Filed:
Mar. 27, 1992
Applicant:
Inventor:
Shigeki Matsutani, Sagamihara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356401 ; 250548 ;
Abstract
A method of detecting a position of the substrate with respect to a particular direction, wherein the substrate has first and second patterns of different sizes in the particular direction and has a surface layer formed thereon includes the steps of detecting the first and second patterns to produce first and second data related to the position of the substrate; and predicting, by using the first and second data and the sizes of the first and second patterns in the particular direction, the position of the substrate as determined when the pattern size in the particular direction is sufficiently small.