The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 1995

Filed:

Aug. 16, 1994
Applicant:
Inventor:

Tadahiko Hotta, Shizuoka, JP;

Assignee:

Yamaha Corporation, Hamamatsu, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 57 ; 257371 ; 257384 ; 257754 ; 257770 ; 437 34 ; 437 56 ; 437200 ; 437193 ; 148D / ; 148D / ;
Abstract

An integrated circuit is fabricated on a semiconductor substrate and comprises an n channel type field effect transistor, a p channel type field effect transistor and an interconnection coupled between the drain regions of the two field effect transistors, and each of the gate electrodes and the interconnection is provided with a polycrystalline silicon and a refractory metal silicide deposited over the polycrystalline silicon, wherein side spacers are eliminated from the gate electrodes and the interconnection, because no short circuiting takes place between the gate electrodes and the source and drain regions by virtue of the deposition of the refractory metal silicide.


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